Wafer Tape UV Curing System

Our advanced UV Wafer Tape Curing System delivers uniform, high-intensity UV light to effectively cure UV-sensitive adhesive tapes on wafers, a critical step that significantly reduces the tape's adhesion. This process is essential for achieving a clean and damage-free tape release, which is crucial for subsequent back-end processes like die bonding. With its intuitive touch-screen interface, you can precisely manage power and duration to optimise your curing process. The system's flexible design is compatible with a wide range of wafer sizes and is easily adaptable to your specific production needs. Equipped with a comprehensive suite of safety features and a long-life LED light source, this system ensures consistent results, maximum productivity, and a safe working environment for your operators.

If you have any questions, please contact us to discuss your specific needs.

Technical Specifications

  • LED Wavelength: 365nm, other wavelengths upon request

  • Light Intensity: Up to 400 mW/cm²

  • Power: Adjustable power settings from 10% to 100%

  • Timer: Countdown timer settings from 0.1s to 999.9s

  • Wafer loading and unloading: Manual

  • Wafer Size Compatibility: 4”, 6”, 8”, 10” and 12” interchangeable

  • Operating Life: > 20,000 hours under normal operating conditions

  • Controls: Integrated intuitive touch-screen controls or a separate LED controller unit

  • Safety Features: Complete UV-blocking enclosure, chamber door safety cut-off, traffic light beacon with alarm (optional), emergency stop switch (optional)

  • Operation Modes:

    • Continuous run at constant power setting

    • Timer mode at constant power setting

    • Multi-steps profile, up to 20 steps in 1 cycle

  • Options: Inert (Nitrogen) gas environment

A compact bench-top UV wafer tape curing system for 4", 6", 8", 10" and 12" wafer.

Bench-top wafer tape UV curing System

UV wafer tape curing system

Compatible fixture for 4” to 12” common wafer dicing rings

Operation Modes

Continuous run

A graph showing UV curing manual mode. UV power is set to 60% and triggered to start. The power remains at 60% and the power is then cut off by manual trigger.

Timer mode

A graph showing UV curing timer mode. UV power is set to 60% and timer set at 15 seconds.and triggered to start. Upon trigger, the UV LED head will emit UV light at 60% power for a duration of 15 seconds as programmed.

Multi-steps profile

A graph showing UV curing step mode. Step 1: 50% power for 2 seconds, Step 2: 75% power for 3 seconds, Step 3: 90% power for 5 seconds, Step 4: 30% power for 5 seconds, Step 5: 10% power for 5 seconds.

Have questions or need a demo?

We would love to help! Get in touch with our team for more information or to arrange a system demonstration.